Case Study on the Process Constraints Observed In Micro-Fabrication of a Pressure Sensor

Chinmayee Hazarika

Scaling down of devices was done to incorporate it to the integrated industry which led to micro-fabrication, the fabrication process where the dimensions of the devices are in microns. Bulk and surface micro-fabrication or micro-machining are two known processes. In bulk micro-machining, the bulk materials are etched out to curve out the device, whereas surface micro-machining is based on deposition and etching of different structural layers on top of the substrate. For surface micro-machining, because of its intricate steps, certain process constraints were observed while fabricating a pressure sensor. These process constraints have to be avoided to obtain a reasonable agreement with the specification specified before fabrication of micro-sensors.

Select Volume / Issues:

• Volume 4 Issue 6, Nov. 2013

Year:

2013

Type of Publication:

Article

Keywords:

Micro-Machining; Bulk and Surface Micro-Machining; Scaling; Micro-Sensors; Etching

Journal:

IJECCE

Volume:

4

Number:

6

Pages:

1725-1727

Month:

November