Investigation and Comparison of Two Movable Plates Electrostatic MEMS Tunable Capacitors

Mir Majid Teymoori; Jaber Merrikhi Ahangarkolaei; Reza Abdollahzadeh Sangrody

Two movable plates MEMS tunable capacitors are investigated and compared in this paper. Moveability of two plates enforce the tunable capacitor to have some interest advantages such as high tuning range, high quality factor, low actuation voltage and a simple tuning mechanism. However, the pull-in effect of the electrostatic actuation is caused a nonlinear behavior which is a major challenge and nonlinear capacitance change is its effect. Employing only one-third displacement of movable plates can solve this challenge. The design approaches and fabrication techniques of these type capacitors and their electrical and mechanical characteristics are finally investigated.

Select Volume / Issues:

• Volume 6,Issue 3, May 2015

Year:

2015

Type of Publication:

Article

Keywords:

MEMS; Tunable Capacitor; Two Movable Plates; Pull-In; Quality Factor; Tuning Range

Journal:

IJECCE

Volume:

6

Number:

3

Pages:

404-408

Month:

May